Strasbaugh

6 DS SP Planarizer

CMP Strasbaugh 6 DS SP Planarizer family

Research Quality: 40% complete

The Strasbaugh 6 DS SP Planarizer is a wafer planarization tool. The Strasbaugh 6 DS SP Planarizer supports wafer sizes of 4", 6", and 8". The Strasbaugh 6 DS SP Planarizer achieves a throughput of 7 wafers per hour for an 800-second polish per wafer.^[1]

6 DS SP Planarizer — Inventory photo — Fig. 016 DS SP PlanarizerInventory photo^[1]

What it is

General reference — not yet source-verified

Chemical mechanical planarization (CMP) tools are used in semiconductor manufacturing to planarize wafer surfaces through a combination of chemical etching and mechanical polishing. The process removes excess material and reduces topography to enable subsequent lithography and deposition steps.

How it works

General reference — not yet source-verified

In a CMP tool a wafer is mounted on a rotating carrier head that presses the wafer face-down against a rotating platen covered with a polishing pad. A chemically active slurry is dispensed onto the pad during polishing. The combination of chemical attack from the slurry and mechanical abrasion from the pad and abrasive particles removes material selectively from elevated features, gradually planarizing the wafer surface. Process parameters such as down force, platen and carrier rotation speeds, slurry composition, and pad condition are controlled to achieve the desired removal rate and uniformity.

What do the numbers mean?

Wafer handling7

Wafer compatibility: 4", 6", 8"^[1]
Throughput: 7 wafer/hour for 800sec of polishing / wafer^[1]
Loader unit type: Carrier Entegris PA 194-60MB-61C02^[1]
Number of cassettes: 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)^[1]
Number of cassettes: 2 lots at the same time /^[2]; 4 cassettes inside the tool (2 sender, 2 receiver)^[2]
Nominal wafer size: 6 inch^[1]

Interested in this tool?

Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of loader unit does the Strasbaugh 6 DS SP use?

The loader unit type is a Carrier Entegris PA 194-60MB-61C02.^[1]^[2]^[3]

Not publicly documented

The following facts about the 6 DS SP Planarizer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 DS SP Planarizer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6 DS SP Planarizer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6 DS SP Planarizer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6 DS SP Planarizer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6 DS SP Planarizer is not on record.
Answerable by: an OEM datasheet or a fab qualification report