Waferpedia

SUSS MicroTec

MJB 3 350 W Mask

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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Wafer size

Wafer Equipment

Vacuum

Vacuum Contact, Hard & Soft[1]

Optics

3.5x and 10x[1]

What it is

The SUSS MicroTec MJB 3 350 W is a mask aligner. The MJB 3 350 W accepts 3-inch wafers.[3][2]

What do the numbers mean?

Vacuum & pumping1

- Exposure Mode
Vacuum Contact, Hard & Soft[1]
Accurate?

Wafer handling4

Wafer size
Wafer Equipment[1]
Accurate?
- Max Wafer Size
3" Diameter[1]
Accurate?
Wafer size
Suss MicroTec PM5 Manual Analytical Wafer Prober[1]
Accurate?
Wafer Sizes
3 inch[2]
Accurate?

Optics & imaging3

- Objectives
3.5x and 10x[1]
Accurate?
- Exposure Resolution
0.8 Microns (under optimum conditions)[1]
Accurate?
- Alignment Resolution
0.25um (operator dependant)[1]
Accurate?

Configuration & options3

- Model
MJB3 Main System[1]
Accurate?
- Manufacturer
Suss MicroTec / Karl Suss[1]
Accurate?
- Eyepieces
10x[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • - Exposure ModeVacuum Contact, Hard & Soft[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the MJB 3 350 W Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MJB 3 350 W Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MJB 3 350 W Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MJB 3 350 W Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MJB 3 350 W Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MJB 3 350 W Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]dealer listingwotol.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
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Last updated Oct 8, 2026.

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