Thermo Fisher
Herareus UT 6120 Drying
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Herareus UT 6120 Drying is a drying oven. The Herareus UT 6120 Drying is categorized as a Thermal / Diffusion tool.[1][2]
What it is
The Herareus UT 6120 Drying is a drying oven manufactured by Thermo Fisher Scientific under the Thermo Scientific / Herareus brand.[1]
How it works
General reference — not yet source-verifiedDrying ovens operate by circulating heated air across the load, using forced convection and precise temperature control to evaporate residual liquids without contaminating the wafers.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fab, drying ovens are positioned after wet clean stations and before load-locked deposition or oxidation furnaces, ensuring that wafers enter subsequent vacuum or high-temperature processes free of moisture.
What do the numbers mean?
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Herareus UT 6120 Drying are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Herareus UT 6120 Drying are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Herareus UT 6120 Drying are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Herareus UT 6120 Drying are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Herareus UT 6120 Drying are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Herareus UT 6120 Drying is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Sep 26, 2026.
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