Waferpedia

Tokyo Electron

P 12 XL Wafer

Test & ProbeTokyo Electron P 12 family
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P 12 XL Wafer — Inventory photo
Fig. 01P 12 XL WaferInventory photo[1]

What it is

The Tokyo Electron P 12 XL Wafer is a wafer prober used for semiconductor test and probe work.[7][1][2]

The P 12 XL Wafer Prober is a fully automatic prober model associated with 12-inch wafers.[1][2]

How it works

General reference — not yet source-verified

A wafer prober positions wafer pads or dies under probe needles so electrical contact can be made for test and characterization.

A wafer prober belongs in the electrical test flow before final singulation and package assembly.

Where it fits in the process flow

General reference — not yet source-verified

The P 12 XL Wafer Prober sits in the wafer-level test stage of semiconductor manufacturing.

The P 12 XL Wafer Prober supports contact-based probe evaluation before downstream assembly and final device test.

Applications

The P 12 XL Wafer Prober is used on 12-inch wafers.[1][2]

What do the numbers mean?

Power & electrical3

50/60 Hz[1]
Accurate?
Voltage
100 Vac[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Wafer handling3

With Gold Chuck Ambient / Hot[1]
Accurate?
Wafer Size
12 inch[1]
Accurate?
Chuck
Gold Chuck Ambient / Hot[1]
Accurate?

Configuration & options5

Fully Automatic[1]
Accurate?
Phase
1 Phase[1]
Accurate?
Make
Tel[7]
Accurate?
Model
P 12 XL[7]
Accurate?
Automation
Fully Automatic[1]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Voltage100 Vac[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the P 12 XL Wafer Prober handle?

The P 12 XL Wafer Prober is specified for 12-inch wafers.[1][2]

Not publicly documented

The following facts about the P 12 XL Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 12 XL Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 12 XL Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 12 XL Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 12 XL Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 12 XL Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Equipment inventory listing
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Last updated Sep 28, 2026.

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