Tokyo Electron
The Precio Octo is a fully automatic wafer prober from Tokyo Electron. The Precio Octo handles wafer sizes from 4 to 8 inches, with specific configurations supporting 4", 5", 6", and 8" wafers. The Precio Octo can be integrated with TELPADS-O for high-speed automated probe mark inspection.[1][2][3][4]

The TELPADS-O function is an automated probe mark inspection system that uses a high-speed engine to inspect all pads and all wafers, produce quantitative quality-control data for probe marks, and reduce operator interaction by eliminating manual microscope inspection.[4]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Precio Octo, 4-5 inch special configuration | — | — | Special configuration for 4-5 inch wafers. | Equipment inventory listing[2] |
| Precio Octo, ambient-hot temperature range configuration | — | — | Configured for 4 to 8 inch wafers with ambient-hot temperature range. | Equipment inventory listing[3] |
| Precio Octo, 8-inch gold hot & cold chuck top system | — | — | Includes CPU VIP3A, chiller C255, right side single top loader, and GPIB interface. | Equipment inventory listing[5] |
| Precio Octo | — | 2011 | Special configuration for 4-5 inch wafers. | Equipment inventory listing[2] |
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
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The following facts about the Precio Octo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Octo are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Precio Octo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio Octo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio Octo is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Precio Octo are on record.
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Last updated Sep 25, 2026.
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