Tokyo Electron
Precio XL Production Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA wafer prober positions a semiconductor wafer under probe needles or a probe interface so that individual devices, circuits, or structures on the wafer can be contacted for measurement.
A wafer probe system generally combines precise wafer staging, vertical motion, and alignment functions so probe contacts can land on intended pad locations with controlled force and repeatable placement.
Where it fits in the process flow
General reference — not yet source-verifiedA wafer prober sits in the electrical test flow before die separation and package assembly.
The machine supports wafer-level test and probe operations on full wafers before downstream sorting, packaging, or final assembly steps.
Applications
The Precio XL is used for semiconductor wafer probing and wafer-level electrical test.[2][4][3][1]
What do the numbers mean?
Wafer handling7
- General parameters
- Accuracy 1.8 µm; Probing Force 200 kg, 300 kg; Stage Types Linear Motor; Type Automatic; Wafer Size 200 mm, 300 mm; Z Accuracy 5 µm[1]
Performance2
Dimensions & facilities1
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Precio XL Production Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio XL Production Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio XL Production Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio XL Production Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio XL Production Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio XL Production Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]semiconductor.directory — semiconductor.directorysemiconductor.directory
- [2]Equipment inventory listing
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]Equipment inventory listing
Last updated Oct 9, 2026.
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