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Varian

948 Helium Leak Detector

Varian 948 Helium Leak Detector family
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The Varian 948 Helium Leak Detector is a helium mass spectrometer leak detector. The Varian 948 Helium Leak Detector is part of the 947, 948, and 960 leak detector family. The Varian 948 Helium Leak Detector can be configured with dry or wet pumps.[1][2]

Varian948 Helium Leak Detector
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Vacuum

TV-70, TV-70D[3]

Optics

helium leak detector[3]

What it is

The Varian 948 is a helium mass spectrometer leak detector that is part of a series also including the 947 and 960 models. The 948 model requires liquid nitrogen for its cold trap operation. The 948 has a weight of 510 lbs. Recommended turbo pumps for the 948 include the TV-70 and TV-70D, and recommended forepumps include the DS-202, DS-302, and DS-402.[4][1][3][2]

How it works

The Varian 948 uses a spectrometer tube and a turbomolecular pump to maintain the high vacuum required for operation. The 948 includes thermocouple gauges for pressure measurement in the main valve block and service block, and a test port for connection to the system under test. The 948 model also incorporates a liquid nitrogen cold trap to improve sensitivity by condensing background gases.[1][2]

What do the numbers mean?

Vacuum & pumping3

Recommended turbo pump
TV-70, TV-70D[3]
Accurate?
Recommended forepump
DS-202, DS-302, DS-402[3]
Accurate?
Pump configuration
can be configured with dry or wet pumps[1]2 sources
Accurate?

Optics & imaging5

Equipment type
helium leak detector[3]
Accurate?
Family
947, 948, and 960 leak detectors[1]
Accurate?
Detector principle
Helium mass spectrometer leak detector[2]
Accurate?
Product type
Helium leak detector[3]
Accurate?
Model family
Models 947, 948 and 960 leak detectors[1]
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Dimensions & facilities1

Weight
510 lbs[3]
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Configuration & options9

Cold trap
nitrogen cold trap (models 948/960 only)[1]
Accurate?
Factory tuning
shipped tuned to helium on Filament No. 1[2]2 sources
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OEM
Varian[4]
Accurate?
Model
948[4]
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Cold trap
Nitrogen cold trap[1]2 sources
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Access feature
Door on the working surface provides access to the nitrogen cold trap[1]
Accurate?
Rear panel information
Leak rate and system status information is available through the rear panel I/O[2]
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Manufacturer
Varian[4]
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Nitrogen cold trap
Included[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Recommended turbo pumpTV-70, TV-70D[3]
  • Recommended forepumpDS-202, DS-302, DS-402[3]
  • Pump configurationcan be configured with dry or wet pumps[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What vacuum pump is recommended for the Varian 948?

Recommended pumps for the Varian 948 include the TV-70 or TV-70D turbo pump and the DS-202, DS-302, or DS-402 forepump.[3]

Does the Varian 948 use a liquid nitrogen cold trap?

Yes, the Varian 948 is designed to use a liquid nitrogen cold trap.[1][2]

Not publicly documented

The following facts about the 948 Helium Leak Detector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 948 Helium Leak Detector are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 948 Helium Leak Detector are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 948 Helium Leak Detector are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 948 Helium Leak Detector are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 948 Helium Leak Detector is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]manualslib.com — manualslib.commanualslib.com
  2. [2]idealvac.com — idealvac.comidealvac.com
  3. [3]provac.com — provac.comprovac.com
  4. [4]Equipment inventory listing
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Last updated Oct 1, 2026.

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