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Varian

V 70

Lab & Support EquipmentVarian V 70 family
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The Varian V 70 is a turbomolecular vacuum pump. The Varian V 70 is used for high and ultra-high vacuum applications. The Varian V 70 operates from a 54 Vac three-phase supply at 1250 Hz.[1][2]

VarianV 70
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Power

120V, 50/60Hz[3]

Vacuum

Turbomolecular vacuum pump[1]

What it is

The Varian V 70, also branded as the Turbo-V 70, is a turbomolecular vacuum pump designed for high and ultra-high vacuum applications. The pump is driven by a high-frequency motor and is available in multiple flange configurations, including ISO 63, ConFlat 4.5 inch, KF 40 NW, and ConFlat 2.75 inch variants.[3][1][2]

How it works

A turbomolecular pump operates using a high-speed rotor with bladed stages that impart momentum to gas molecules, directing them toward the exhaust. In the Turbo-V 70, the turbine rotor is supported by permanently lubricated ceramic ball bearings and is driven by a three-phase motor operating at 54 VAC and 1250 Hz during normal operation. The pump can operate in any orientation and relies on natural convection air cooling, with optional forced air or water cooling kits for heavy loads.[1][2]

What do the numbers mean?

Power & electrical4

Voltage
120V, 50/60Hz[3]
Accurate?
Motor input
54 Vac three-phase at 1250 Hz[1]
Accurate?
Input power
54 VAC, three phase, 1,250 Hz[2]
Accurate?
Input
54 VAC, three phase, 1,250 Hz[2]
Accurate?

Vacuum & pumping7

Type
Turbomolecular vacuum pump[1]
Accurate?
Applications
High and ultra-high vacuum applications[1]
Accurate?
High-vacuum flange versions
ISO 63, ConFlat 4.5-inch OD, KF 40 NW, ConFlat 2.75-inch OD[1]
Accurate?
Pumping speed with 4.5-inch CF or ISO 63
N2: 68 l/s; He: 60 l/s; H2: 45 l/s[1]
Accurate?
Pumping speed with 2.75-inch CF or KF 40 NW
N2: 45 l/s; He: 50 l/s; H2: 41 l/s[1]
Accurate?
Base pressure
1 x 10^-9 mbar (8 x 10^-10 Torr)[1]
Accurate?
Fore-vacuum connection
KF 16 NW flange[1]
Accurate?

Control & software1

With controller, no front panel display[3]
Accurate?

Configuration & options9

Conflat flange 4.5"OD and 2.75" ID[3]
Accurate?
Turbine stages
11 bladed stages[1]
Accurate?
Compression ratio
N2: 5 x 10^7; He: 4 x 10^3; H2: 4 x 10^2[1]
Accurate?
Cooling
Natural convection air cooling; optional water cooling or forced air cooling[1]
Accurate?
Vibration amplitude
< 0.01 μm[1]
Accurate?
Operating position
Any position[1]
Accurate?
Start-up time
< 60 seconds[2]
Accurate?
Rotational speed
75,000 rpm[2]
Accurate?
Noise level
45 dB(A) at 1 meter[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Turbo-V 70——ISO 63 high-vacuum flange version.pages.uoregon.edu[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage120V, 50/60Hz[3]
  • TypeTurbomolecular vacuum pump[1]
  • ApplicationsHigh and ultra-high vacuum applications[1]
  • Motor input54 Vac three-phase at 1250 Hz[1]
  • Input power54 VAC, three phase, 1,250 Hz[2]
  • High-vacuum flange versionsISO 63, ConFlat 4.5-inch OD, KF 40 NW, ConFlat 2.75-inch OD[1]
  • Pumping speed with 4.5-inch CF or ISO 63N2: 68 l/s; He: 60 l/s; H2: 45 l/s[1]
  • Pumping speed with 2.75-inch CF or KF 40 NWN2: 45 l/s; He: 50 l/s; H2: 41 l/s[1]
  • Base pressure1 x 10^-9 mbar (8 x 10^-10 Torr)[1]
  • Fore-vacuum connectionKF 16 NW flange[1]
  • Input54 VAC, three phase, 1,250 Hz[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What are the pumping speed specifications for the Turbo-V 70?

With a CF 4.5 inch or ISO 63 flange, the pumping speed is 68 l/s for N₂, 60 l/s for He, and 45 l/s for H₂. With a CF 2.75 inch or KF 40 NW flange, the speeds are 45 l/s for N₂, 50 l/s for He, and 41 l/s for H₂.[1][2]

What is the base pressure of the Turbo-V 70?

The ultimate base pressure is 1 × 10⁻⁹ mbar (8 × 10⁻¹⁰ Torr).[1][2]

What flange options are available for the Turbo-V 70?

The pump is offered with ISO 63, ConFlat 4.5 inch, KF 40 NW, and ConFlat 2.75 inch high-vacuum flanges. The foreline flange is KF 16 NW.[1][2]

What is the rotational speed and start-up time of the Turbo-V 70?

The rotational speed is 75,000 rpm and the start-up time is less than 60 seconds.[2]

What controller is required for the Turbo-V 70?

The pump must be used with a compatible Varian controller from the series 969-9405, 969-9505, 969-9507, or 969-9508.[1]

Not publicly documented

The following facts about the V 70 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the V 70 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the V 70 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the V 70 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the V 70 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the V 70 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]pages.uoregon.edu — pages.uoregon.edupages.uoregon.edu
  2. [2]ptbsales.com — ptbsales.comptbsales.com
  3. [3]inventory listing
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Last updated Oct 10, 2026.

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