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Wyko

NT9100

Metrology & InspectionWyko NT9100 family
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WykoNT9100
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What it is

The Wyko NT9100 is an optical profilometer for microscopy and surface analysis. The Wyko NT9100 provides non-contact optical profiles and surface metrology.[1][2]

The Wyko NT9100 is a bench-top optical profiling system. The Wyko NT9100 belongs to the NT9000 Series optical profilers.[3][4]

How it works

The Wyko NT9100 measures surfaces without contact. The Wyko NT9100 uses optical profiling to generate topography data and film thickness information.[3][4]

The Wyko NT9100 uses a dual LED illuminator and green and white LED light. The Wyko NT9100 supports objective selection, stage motion, and stitched measurements for larger areas.[3][4]

The Wyko NT9100 uses Vision analysis software for two dimensional and three dimensional display and analysis. The Wyko NT9100 supports automated measurement sequences, data logging, and pass or fail criteria for process feedback and statistical process control.[3][4]

Where it fits in the process flow

The Wyko NT9100 is used for R&D, wear analysis, failure analysis, process control, and monitoring. The Wyko NT9100 is used for measurement tasks that need non-contact surface characterization.[3][4]

Applications

The Wyko NT9100 is used for MEMS, thick films, optics, ceramics, and advanced materials research. The Wyko NT9100 is also used for surface topography work on super-smooth samples and rough samples.[1][3][4]

  • MEMS
  • thick films
  • optics
  • ceramics
  • advanced materials research

What do the numbers mean?

Optics & imaging11

Capabilities
Optical profiles[1]
Accurate?
Objectives
5X, 20X, 100X[1]2 sources
Accurate?
Vertical resolution
0.1 nm[1]
Accurate?
Capabilities
Optical profiles; surface analysis[2]
Accurate?
Objectives
1.5X, 2.5X, 5X, 10X, 20X, 50X; magnifications from 0.75X to 100X; long working distance objectives available; optional motorized turret; optional Through Transmissive Media objectives[3]
Accurate?
Measurement array
640 x 480, non-interlaced; optional 1392 x 1040 camera[3]
Accurate?
Optical assembly
Dual LED illuminator; three-position FOV turret, closed-loop, 10 mm scan[3]
Accurate?
Vertical measurement
0.1 nm to 10 mm standard range[3]
Accurate?
Vertical resolution
<0.1 nm RMS[3]
Accurate?
Repeatability
0.05 nm[3]
Accurate?
Optical resolution
0.49 μm minimum[3]
Accurate?

Dimensions & facilities1

Measurement capability
Non-contact, three-dimensional, topography and film thickness[3]
Accurate?

Configuration & options7

Equipment type
Microscopy/Surface Analysis[1]
Accurate?
Measurement mode
Non-contact surface metrology[1]
Accurate?
Field-of-view multipliers
0.55X, 0.75X, 1X, 1.5X, 2X[3]
Accurate?
Light source
Long-lifetime green and white LEDs[3]
Accurate?
Stages
Automated 100 mm Z-axis; ±6° tip/tilt stage; 100 mm XY manual stage standard; 150 mm XY auto stage optional[3]
Accurate?
Vertical scan speed
User-selectable up to 24 μm/sec[3]
Accurate?
Certification
CE, NRTL[3]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What objectives are available for the NT9100?

The NT9100 supports objectives of 1.5X, 2.5X, 5X, 10X, 20X, and 50X, providing magnifications from 0.75X to 100X.[3]

What is the measurement range of the NT9100?

The vertical measurement range is from 0.1nm to 10mm.[3]

Does the NT9100 have an automated stage option?

Yes, an optional automated XY stage with 150mm travel is available, and the X-Y stage automation provides programmability for stitching large-area measurements.[3]

What software does the NT9100 use?

The NT9100 uses Vision analysis software for 2D and 3D data analysis, supporting automated measurement sequences, data logging, and pass/fail criteria for process feedback and SPC.[3][2]

Not publicly documented

The following facts about the NT9100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NT9100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NT9100 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NT9100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NT9100 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NT9100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
  4. [4]https://www.me.iitb.ac.in/~ramesh/mtl/Wyko_NT9100.pdf — me.iitb.ac.inme.iitb.ac.in
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Last updated Oct 5, 2026.

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