Waferpedia

Yaskawa

XU RCM 9205 Atmospheric Wafer Robot

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Yaskawa XU RCM 9205 is an atmospheric wafer robot designed for handling 12-inch wafers. The Yaskawa XU RCM 9205 is supplied with an ERCR-NS01-A003 controller and is compatible with KLA equipment.[1][2]

YaskawaXU RCM 9205 Atmospheric Wafer Robot
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What is it?

The Yaskawa XU RCM 9205 is an atmospheric wafer robot for 12-inch wafers, supplied with an ERCR-NS01-A003 controller and compatible with KLA equipment.

What do the numbers mean?

Wafer handling1

Wafer Size
12 inch[1]
Accurate?

Control & software2

With ERCR-NS01-A003 Controller, compatible with KLA[1]
Accurate?
Controller
ERCR-NS01-A003[1]
Accurate?

Configuration & options1

Compatibility
KLA[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What controller is used with the XU RCM 9205?

An ERCR-NS01-A003 controller.[1][2]

With what equipment is the XU RCM 9205 compatible?

KLA equipment.[1][2]

Not publicly documented

The following facts about the XU RCM 9205 Atmospheric Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XU RCM 9205 Atmospheric Wafer Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XU RCM 9205 Atmospheric Wafer Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XU RCM 9205 Atmospheric Wafer Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XU RCM 9205 Atmospheric Wafer Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XU RCM 9205 Atmospheric Wafer Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]XU RCM 9205 Atmospheric Wafer Robot — Yaskawa | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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