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YES

1000P

Wet Processing / CleanYES 1000P family
Research Quality: 30% complete

The Glen/YES 1000P is a plasma cleaning system with a 1000 watt parallel plate configuration. The 1000P uses four 16x16 inch shelves providing a total capacity of 1024 square inches. The 1000P is PLC-driven with plain English real-time process readout and diagnostics.[1][2]

YES1000P
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What is it?

The source describes the 1000P as part of the R-Series Plasma Cleaning Systems and states that it is designed for low volume R&D through high volume production use. It is listed with four 16 x 16 inch shelves, a total capacity of 1024 square inches, and a PLC-driven control system with plain English real-time process readout and diagnostics.

What can it run?

Process applications and technology nodes documented for this tool.

  • Low volume R&D
  • High volume production
  • Plasma cleaning
  • Surface modification

What do the numbers mean?

Control & software2

Control system
PLC driven with plain English real time process readout and diagnostics in the event of system abort[1]
Accurate?
Control system
PLC driven with plain English real time process readout and diagnostics[1]
Accurate?

Configuration & options10

Model
1000P[1]
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System type
Plasma cleaning system[1]
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Shelf configuration
Four 16 x 16 inch shelves[1]
Accurate?
Total capacity
1024 square inches[1]
Accurate?
Number of shelves
4[1]
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Shelf size
16 x 16 inches[1]
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Power
1000 W[2]
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Parallel plate[2]
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Operation modes
Active, RIE, Downstream[1]
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Sample size range
From smallest semiconductor chip to large flat panels[1]
Accurate?

Vintage & configurations

  1. 1998-03Acquisition[1]

    YES acquired Glen Technologies, integrating the 1000P (originally Glen model) into YES product line

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the total processing area of the YES 1000P?

The YES 1000P has four shelves of 16 by 16 inches each, for a total capacity of 1024 square inches.[1]

Is the YES 1000P PLC driven?

The system is PLC driven with plain English real time process readout and diagnostics in the event of system abort.[1]

What are the common applications of the YES 1000P?

The YES 1000P is used for plasma cleaning, surface modification, adhesion improvement (e.g., polyethylene to stainless steel, gold to quartz), and wiring to semiconductor chips in hybrid circuits.[1]

Not publicly documented

The following facts about the 1000P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the 1000P are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 1000P are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 1000P are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 1000P is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 1000P are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
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Last updated Sep 22, 2026.

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