Waferpedia

YES

450 PB 8 2 Polymide

Thermal / DiffusionYES 450 family
Research Quality: 50% complete

The YES 450 PB 8 2 Polymide is a polyimide cure oven made by YES for 2-inch to 8-inch wafers. The YES 450 PB 8 2 Polymide has vacuum capability and N2 gas delivery. The YES 450 PB 8 2 Polymide operates at 208 V and 50/60 Hz.[1][2]

450 PB 8 2 Polymide — Inventory photo
Fig. 01450 PB 8 2 PolymideInventory photo[1]

Power

208 V[1]

Vacuum

Vacuum[1]

Gas delivery

N2[1]

What it is

General reference — not yet source-verified

Cure ovens are thermal processing tools used in semiconductor fabrication to thermally cure polyimide films deposited on wafers. Polyimide is a dielectric material often used for passivation layers, interlayer dielectrics, and stress-buffer coatings.

How it works

General reference — not yet source-verified

In a polyimide cure oven, wafers are heated in a programmed temperature profile to drive off solvents from the spun-on polyimide precursor and to initiate the imidization reaction that converts the precursor into a stable polyimide film. The process typically uses an inert nitrogen atmosphere to prevent oxidation and may incorporate vacuum steps for enhanced solvent removal.

Where it fits in the process flow

General reference — not yet source-verified

The cure oven is positioned in the semiconductor process flow after polyimide deposition (typically by spin coating) and before subsequent processing steps such as metallization or final passivation. The curing step is critical for fully cross-linking the polyimide to achieve its mechanical and electrical properties.

What do the numbers mean?

Power & electrical3

Voltage
208 V[1]
Accurate?
50/60 Hz[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Vacuum & pumping2

Vacuum[1]
Accurate?
Vacuum
Vacuum[1]
Accurate?

Wafer handling1

Wafer size
2, 3, 4, 5, 6, 8 inch[1]
Accurate?

Gas & chemistry1

Gases
N2[1]
Accurate?

Configuration & options2

Manufacturer
YES[1]
Accurate?
Category
Thermal / Diffusion[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 V[1]
  • Configuration50/60 Hz[1]
  • ConfigurationVacuum[1]
  • GasesN2[1]
  • Frequency50/60 Hz[1]
  • VacuumVacuum[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Yes 450 PB 8 2?

It is a polymide cure oven.[1]

Not publicly documented

The following facts about the 450 PB 8 2 Polymide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB 8 2 Polymide are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 450 PB 8 2 Polymide are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 450 PB 8 2 Polymide are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 450 PB 8 2 Polymide are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 450 PB 8 2 Polymide is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 7, 2026.

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