YES
58
What it is
The YES 58 is a thermal processing oven in the diffusion category.[3]
The YES 58 is also used as an NH3 image reversal oven in photolithography workflows.[4]
How it works
The YES 58-TA oven uses NH3 gas to reverse the tone of positive photoresist.[4]
The chamber is purged of oxygen using vacuum and heat before it is filled with NH3 vapor at 500 Torr.[4]
Where it fits in the process flow
The reversal process supports the creation of an undercut profile in photoresist for lift-off processing.[4]
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What electrical input is specified for the YES 58?
The YES 58 is specified at 120 VAC, 50/60 Hz, 14.2 A, and 1700 Watts.[1][3]
What process gas does the YES 58 use for image reversal?
The YES 58-TA oven uses NH3 ammonia gas.[4]
What pressure is used for the NH3 step?
The NH3 vapor step uses 500 Torr.[4]
What type of resist process does the YES 58 support?
The YES 58 reverses the tone of positive photoresist and supports image reversal processing.[4]
What downstream patterning purpose does the YES 58 serve?
The YES 58 supports undercut profile formation for lift-off processing.[4]
Not publicly documented
The following facts about the 58 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 58 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 58 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 58 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 58 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 58 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]cnfusers.cornell.edu — cnfusers.cornell.educnfusers.cornell.edu
Last updated Oct 5, 2026.
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View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
