YES

PB 12 2 P CP Polyimide

Thermal / Diffusion Up to 50 wafers per batch (two 25-wafer cassettes)YES PB 12 2 P CP Polyimide family

Research Quality: 50% complete

The YES PB 12 2 P CP Polyimide is a polyimide bake oven. The YES PB 12 2 P CP Polyimide is in the Thermal / Diffusion category. The YES PB 12 2 P CP Polyimide supports wafer sizes up to 300 mm.^[1]^[2]

PB 12 2 P CP Polyimide — Inventory photo — Fig. 01PB 12 2 P CP PolyimideInventory photo^[1]

Wafer size

Up to 50 wafers per batch (two 25-wafer cassettes)

Power

208 V, 3-phase, 50/60 Hz, 40 A^[1]

Vacuum

Vacuum and Process Control:^[1]

What it is

The YES PB 12 2 P CP Polyimide is a thermal or diffusion bake oven.^[2]

The PB 12 2 P CP Polyimide is a bake oven with a PLC touchscreen interface and capacity for up to fifty wafers per batch.^[2]

How it works

The PB 12 2 P CP Polyimide supports operation from ambient to four hundred fifty degrees Celsius, and an optional high-temperature version extends to five hundred fifty degrees Celsius.^[1]

The PB 12 2 P CP Polyimide uses LED temperature and set-point displays, ramp-up and ramp-down control, multiple temperature-dependent PID settings, over-temperature protection shut-off, and an alternate process vacuum valve with vacuum plumbing and a dual set-point vacuum gauge.^[1]^[2]

Where it fits in the process flow

General reference — not yet source-verified

A thermal bake oven such as the PB 12 2 P CP Polyimide sits in the wafer-processing flow after coating or other wet-film steps and before later lithography or patterning operations that need a stabilized film condition.

Applications

The PB 12 2 P CP Polyimide is intended for polyimide processing.^[1]^[2]

The PB 12 2 P CP Polyimide uses an air-cooled chamber with external forced convection, a 316L stainless-steel chamber, and preheated nitrogen for laminar purge.^[1]

What do the numbers mean?

Power & electrical2

Voltage: 208 V, 3-phase, 50/60 Hz, 40 A^[1]
Power: 208 V, 3-phase, 50/60 Hz, 40 A^[1]

Vacuum & pumping8

Temperature uniformity: ±5 °C at dwell after stabilization (empty chamber, > 50 Torr)^[1]; Vacuum and Process Control:^[1]; Alternate process vacuum valve^[1]; Digital Granville-Phillips™ dual set-point vacuum gauge^[1]; Vacuum plumbing with VCR fittings^[1]
Temperature uniformity: ±5 °C at dwell after stabilization (empty chamber, > 50 Torr)^[1]
Vacuum gauge: Digital Granville-Phillips™ dual set-point vacuum gauge^[1]
Vacuum plumbing: VCR fittings^[1]

Wafer handling5

Capacity: up to 50 wafers per batch^[1]
Wafer cassette configuration: two 25-wafer cassettes^[1]
Maximum wafer size: up to 300 mm^[1]
Wafer size: Up to 50 wafers per batch (two 25-wafer cassettes)^[1]
Wafer size: Supports wafer sizes up to 300 mm^[1]

Gas & chemistry1

Gas input: 1 standard process-gas input (up to 3 optional with mass-flow controllers)^[1]

Control & software7

Temperature Control:^[1]; LED temperature and set-point displays with ramp-up/down control^[1]; Controller and Interface:^[1]; PLC controller with color touchscreen operator interface^[1]; RS-232 interface for data download/monitoring^[1]
Controller: PLC controller with color touchscreen operator interface^[1]
Interface: RS-232 interface for data download/monitoring^[1]

Dimensions & facilities2

Chamber dimensions: 53.34 cm (ID) × 104.06 cm (D) (≈ 21″ × 41″)^[1]
Overall dimensions: 89.48 cm (W) × 174.57 cm (D) × 138.7 cm (H) (≈ 35.23″ × 68.73″ × 54.61″)^[1]

Configuration & options16

Operating temperature: ambient to 450 °C (optional high-temp version up to 550 °C)^[1]; Multiple temperature-dependent PID settings for stable operation^[1]
Average heat-up rate: 3.5 °C/min (150 °C → 450 °C)^[1]
Average cool-down rate: 3.0 °C/min (450 °C → 150 °C)^[1]; Over-temperature protection shut-off^[1]; 8 programmable temperature profiles (up to 200 with YES-DAQ-LR option)^[1]; Visual “Cycle Complete” indicator and audible alarm^[1]; Light tower with Abort, Cycle Complete, and Running lights^[1]; EMO (Emergency Off) buttons — front and rear^[1]
Operating temperature: ambient to 450 °C^[1]
Optional high-temperature version: up to 550 °C^[1]
Programmable temperature profiles: 8 programmable temperature profiles (up to 200 with YES-DAQ-LR option)^[1]
Chamber material: 316L stainless steel^[1]
Cooling: Air-cooled with external forced convection^[1]
Oxygen concentration: ≤ 10 ppm over background^[1]
Process area: 37.59 cm (W) × 74.4 cm (D) × 36.07 cm (H) (≈ 14.8″ × 29.3″ × 14.2″)^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 V, 3-phase, 50/60 Hz, 40 A^[1]
Temperature uniformity±5 °C at dwell after stabilization (empty chamber, > 50 Torr)^[1]
ConfigurationVacuum and Process Control:^[1]
ConfigurationAlternate process vacuum valve^[1]
ConfigurationDigital Granville-Phillips™ dual set-point vacuum gauge^[1]
ConfigurationVacuum plumbing with VCR fittings^[1]
Power208 V, 3-phase, 50/60 Hz, 40 A^[1]
Temperature uniformity±5 °C at dwell after stabilization (empty chamber, > 50 Torr)^[1]
Vacuum gaugeDigital Granville-Phillips™ dual set-point vacuum gauge^[1]
Vacuum plumbingVCR fittings^[1]
Gas input1 standard process-gas input (up to 3 optional with mass-flow controllers)^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the PB 12 2 P CP Polyimide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PB 12 2 P CP Polyimide are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PB 12 2 P CP Polyimide are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PB 12 2 P CP Polyimide are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PB 12 2 P CP Polyimide are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PB 12 2 P CP Polyimide is not on record.
Answerable by: an OEM datasheet or a fab qualification report