Zeiss
Auriga 60
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Zeiss Auriga 60 is a high-resolution CrossBeam FIB-SEM (Focused Ion Beam - Scanning Electron Microscope) workstation. The Zeiss Auriga 60 uses a Schottky field emission electron column (Gemini column) and a gallium liquid metal ion source (Orsay Physics Cobra column). The Zeiss Auriga 60 achieves electron beam resolution of 1.0 nm at 15 kV and 1.9 nm at 1 kV, and ion beam resolution of 2.5 nm at 30 kV.[1][2][3][4]
What it is
The Zeiss Auriga 60 is a dual-beam focused ion beam and scanning electron microscope system. The Zeiss Auriga 60 combines electron imaging and ion-beam milling in one instrument for nanoscale inspection and structuring.[3][5]
The Zeiss Auriga 60 is a high-resolution CrossBeam FIB-SEM workstation. The Zeiss Auriga 60 is also used as an SEM/FIB instrument in microscopy and materials-characterization laboratories.[1][2]
How it works
A focused ion beam uses a focused beam of ions to remove material by sputtering and to modify surfaces at the micro and nanoscale. A dual-beam FIB-SEM combines an electron column and an ion column so the same feature can be examined with either beam or with both beams.[5][3]
The Zeiss Auriga 60 uses a Zeiss Gemini Schottky field-emission electron column and a gallium liquid-metal ion source. The Zeiss Auriga 60 also includes imaging detectors, gas-injection functions, a micromanipulator, and a transfer system for advanced specimen handling.[1][2][3]
A focused ion beam instrument is used for site-specific analysis, deposition, and ablation. A focused ion beam instrument is also used as a micro-machining tool for material modification at very small scales.[5]
Where it fits in the process flow
The Zeiss Auriga 60 is used for TEM sample preparation, 3D slice-and-view tomography, and nanoscale deposition and contacting. The Zeiss Auriga 60 also supports correlative microscopy and cryo-SEM work.[3]
Applications
What do the numbers mean?
Power & electrical2
Vacuum & pumping1
Wafer handling1
Gas & chemistry1
Optics & imaging10
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of instrument is the Zeiss Auriga 60?
The Zeiss Auriga 60 is a dual-beam focused ion beam and scanning electron microscope system.[3][5]
Not publicly documented
The following facts about the Auriga 60 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Auriga 60 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Auriga 60 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Auriga 60 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Auriga 60 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Auriga 60 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]amcl.udel.edu — amcl.udel.eduamcl.udel.edu
- [2]int.kit.edu — int.kit.eduint.kit.edu
- [3]Helmholtz Imaging CONNECT - Zeiss Auriga 60 — connect.helmholtz-imaging.deconnect.helmholtz-imaging.de
- [4]camm.udel.edu — camm.udel.educamm.udel.edu
- [5]Zeiss Auriga 60 Focused Ion Beam: Search Resources: Research Equipment and Tools: Indiana University — equipment-tools.research.iu.eduequipment-tools.research.iu.edu
- [6]Equipment inventory listing
Last updated Oct 3, 2026.