Gemini560

The Zeiss Gemini560 is a field emission scanning electron microscope (FESEM). The Zeiss Gemini560 is categorized as Metrology & Inspection equipment. The Zeiss Gemini560 uses a field emission electron source.^[4]

The Zeiss Gemini560 achieves a resolution of 0.5 nm at 15 kV and 0.8 nm at 1 kV. The Zeiss Gemini560 supports secondary electron and backscatter electron imaging and can be equipped with an IR-CCD camera. The Zeiss Gemini560 can be fitted with energy dispersive spectroscopy (EDS) for elemental analysis and electron backscatter diffraction (EBSD) for crystallographic analysis. The EDS system available on the Zeiss Gemini560 is an Oxford Ultim Extreme with a detection range from lithium to californium. The EDS energy resolution of the Zeiss Gemini560 is ≤100 eV at Mn Kα, and the EDS spatial resolution is 10 nm.^[4]

In semiconductor fabrication, metrology and inspection tools of this class are used after process steps to verify pattern fidelity, measure critical dimensions, and inspect for defects. The tool is typically operated in a cleanroom environment and supports process development and failure analysis.

The Zeiss Gemini560 can perform elemental analysis with energy dispersive spectroscopy (EDS) and crystallographic analysis with electron backscatter diffraction (EBSD). The Zeiss Gemini560 is used in materials science and nanotechnology research.^[4][1]