Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2011– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | KLA Surfscan |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | HDD not included[2] |
| Wafer size | — | Bare wafer inspection station[2] |
| Illumination | — | Deep-ultraviolet (DUV)[2] |
| Wafer loading unit ports | — | 3[2] |
| Haze maps | — | Full-wafer high-resolution[2] |
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