Comparison ledger
Axcelis GSD 200 E 2 Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 IonAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian 160 XP Ion |
| Specifications | ||
| High Current | GSD-200EE[1] | — |
| Configuration | Software Version 6.12.3[1] | 150mm High Current IMP[3] |
| Ion Source Type | ELS[1] | — |
| Source Material Type | Moly[1] | — |
| Single Stage Extraction | 90keV[1] | — |
| Beamline Version | Standard[1] | — |
| Source Turbo Pump (P1) | STP H2000C[1] | — |
| Beam Line Cryo Pump (P3) | CTI Onboard 10[1] | — |
| End Station Cryo Pump (P2) | CTI Onboard 8[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | GSD 200 E 2[1] | 160 XP Ion[4] |
| Category | Ion Implantation[2] | Ion Implantation[3] |
| Wafer size | 6 inch[1] | — |
| Software version | 6.12.3[1] | — |
| GEM/SECS interface | Present[1] | — |
| Cassette capability | 4-cassette capability[1] | — |
| Automated beam tuning and set-up | w/Eaton Autotune[1] | — |
| Energy range | 90KeV[1] | — |
| Beamline and source pumps | Beamline and Source Pumps[2] | — |
| Gas Type | MFC Type and Model[1] | — |
| Ar | UNIT 1662 10SCCM - SDS[1] | — |
| BF3 | UNIT 1662 10SCCM - SDS[1] | — |
| AsH3 | UNIT 1662 10SCCM - SDS[1] | — |
| PH3 | UNIT 1660 10SCCM - SDS[1] | — |
| External Facilities Connections | Ar N2[1] | — |
| Cryo Compressors | CTI 9600 (1)[1] | — |
| Remote Disk Chiller | SMC-HRS050[1] | — |
| OEM | — | Varian[4] |
| Tool type | — | ion implanter[3] |
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