Axcelis

GSD 200 E 2 Ion

Research Quality: 50% complete

The Axcelis GSD 200 E 2 Ion is an ion implanter. The Axcelis GSD 200 E 2 Ion is configured for 6 inch wafers. The Axcelis GSD 200 E 2 Ion includes high-current GSD-200EE configuration with 4-cassette capability.^[1]^[2]

GSD 200 E 2 Ion — Inventory photo — Fig. 01GSD 200 E 2 IonInventory photo^[1]

Vacuum

Beamline and Source Pumps^[1]

Gas delivery

MFC Type and Model^[1]

What it is

The Axcelis GSD 200 E 2 Ion is an ion implanter used in semiconductor fabrication.^[1]^[2]

The GSD 200 E 2 Ion is an Axcelis GSD 200 family tool.^[2]

How it works

The Axcelis GSD 200 E 2 Ion includes automated beam tuning and set-up with Eaton Autotune, a GEM/SECS interface, and an enhanced low-energy beamline.^[1]^[2]

Where it fits in the process flow

The Axcelis GSD 200 E 2 Ion supports wafer handling with 4-cassette capability and automatic flat or notch alignment with a buffer cassette.^[1]^[2]

Applications

The Axcelis GSD 200 E 2 Ion is configured as a high-current tool with a single-stage extraction of 90 keV and an energy range of 90 keV.^[1]^[2]

What do the numbers mean?

Vacuum & pumping6

Beamline and Source Pumps^[1]
Source Turbo Pump (P1): STP H2000C^[1]
Beam Line Cryo Pump (P3): CTI Onboard 10^[1]
End Station Cryo Pump (P2): CTI Onboard 8^[1]
Beamline and source pumps: Beamline and Source Pumps^[2]
Cryo Compressors: CTI 9600 (1)^[1]

Wafer handling4

4-Cassette Capability^[1]; Automatic Flat or Notch Alignment Capability w/buffer cassette^[1]
Wafer size: 6 inch^[1]
Cassette capability: 4-cassette capability^[1]

Gas & chemistry1

Gas Type: MFC Type and Model^[1]

Control & software4

Software Version 6.12.3^[1]; GEM/SECS Interface^[1]
Software version: 6.12.3^[1]
GEM/SECS interface: Present^[1]

Dimensions & facilities1

External Facilities Connections: Ar N2^[1]

Configuration & options23

High Current: GSD-200EE^[1]; Automated Beam tuning and Set-Up w/Eaton Autotune^[1]
Ion Source Type: ELS^[1]
Source Material Type: Moly^[1]; Signal Tower^[1]; Flag Faraday Injector^[1]; Direct Rotory Drive^[1]; Enhanced Low Energy Beamline^[1]; Process Disk w/Active Cooling & Chiller^[1]
Single Stage Extraction: 90keV^[1]
Beamline Version: Standard^[1]; Block Upgrade^[1]
Manufacturer: Axcelis^[1]
Model: GSD 200 E 2^[1]
Category: Ion Implantation^[2]; High Current GSD-200EE^[2]
Automated beam tuning and set-up: w/Eaton Autotune^[1]
Energy range: 90KeV^[1]
Ar: UNIT 1662 10SCCM - SDS^[1]
BF3: UNIT 1662 10SCCM - SDS^[1]
AsH3: UNIT 1662 10SCCM - SDS^[1]
PH3: UNIT 1660 10SCCM - SDS^[1]
Remote Disk Chiller: SMC-HRS050^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationBeamline and Source Pumps^[1]
Source Turbo Pump (P1)STP H2000C^[1]
Beam Line Cryo Pump (P3)CTI Onboard 10^[1]
End Station Cryo Pump (P2)CTI Onboard 8^[1]
Beamline and source pumpsBeamline and Source Pumps^[2]
Gas TypeMFC Type and Model^[1]
Cryo CompressorsCTI 9600 (1)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the GSD 200 E 2 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 200 E 2 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GSD 200 E 2 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GSD 200 E 2 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GSD 200 E 2 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GSD 200 E 2 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report