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NV GSD 200 High Currentversus0216 7696, E 11368072 ESC

Axcelis NV GSD 200 High Current, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV GSD 200 High CurrentAxcelis
0216 7696, E 11368072 ESCVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Varian 0216 7696, E 11368072 ESC
Specifications
ConfigurationDeploys Ar, AsH3, BF3 and PH3[1]Platen ADV-S Type[2]
Type—ESC Platen ADV-S Type[2]
Category—Ion Implantation[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com