Waferpedia

Axcelis

NV GSD 200 High Current

Ion ImplantationAxcelis NV GSD 200 family
Research Quality: 20% complete
NV GSD 200 High Current — Inventory photo
Fig. 01NV GSD 200 High CurrentInventory photo[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Novell network inoperative
  • Ion source P1 vacuum pump
  • End station robot
  • Cryogenic pumps

What do the numbers mean?

Vacuum & pumping2

Ion source P1 vacuum pump[1]
Accurate?
Cryogenic pumps[1]
Accurate?

Wafer handling1

End station robot[1]
Accurate?

Configuration & options3

Deploys Ar, AsH3, BF3 and PH3[1]
Accurate?
Repairs needed:[1]
Accurate?
Novell network inoperative[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationIon source P1 vacuum pump[1]
  • ConfigurationCryogenic pumps[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What type of equipment is the Axcelis NV GSD 200?

It is a high current ion implanter.[1]

Not publicly documented

The following facts about the NV GSD 200 High Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD 200 High Current are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NV GSD 200 High Current are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NV GSD 200 High Current are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NV GSD 200 High Current is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NV GSD 200 High Current are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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