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NV GSD 200 High Currentversus160 XP

Axcelis NV GSD 200 High Current, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV GSD 200 High CurrentAxcelis
160 XPVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
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FamilyAxcelis NV GSD 200Varian 160 XP
Cited variants—
Specifications
ConfigurationDeploys Ar, AsH3, BF3 and PH3[2]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing