Comparison ledger
Dektak 6M, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6MDektak | 1000PYES |
|---|---|---|
| OEM | Dektak | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 6" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Dektak 6M | YES 1000P |
| Specifications | ||
| Instrument type | Stylus profilometer[1] | — |
| Equipment type | Cleanroom Instrumentation; Metrology; Microscopy/Surface Analysis; Surface Analysis[1] | — |
| Measured feature | Film step height[1] | — |
| Measurement range | Steps from 260 microns down to 10 nm[1] | — |
| Additional uses | Surface topography profiling and surface roughness measurement in the nanometer range[1] | — |
| Stylus radius | 25-micron radius high aspect ratio stylus[1] | — |
| Maximum acceptable sample size | 6 inches[1] | — |
| Location | FNT 4.106[1] | — |
| Contact | Dr. Raluca Gearba[1] | — |
| Step height measurement range | 260 µm to 10 nm[1] | — |
| Maximum sample size | 6 inches[1] | — |
| Model | — | 1000P[2] |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Configuration | — | Parallel plate[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
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