Comparison ledger
Disco DCS 1440 Wafer Cleaner Spin, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Disco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DCS | YES 1000P |
| Specifications | ||
| Configuration | 5 in. table[1] | Parallel plate[4] |
| Max. workpiece size | Φ8 inch[2] | — |
| Table RPM | 100 - 3000 min^-1[2] | — |
| Setting time for cleaning/drying | 0 - 999 sec[2] | — |
| Cleaning nozzle speed | 1 - 37.5 °/sec[2] | — |
| Cleaning range | Φ365 mm (up to 210 x 210 mm)[2] | — |
| Cleaning pressure range | 2.3 - 11.8 MPa[2] | — |
| Equipment dimensions (W×D×H) | 400 × 600 × 1220 mm[2] | — |
| Dry mass | Approx. 124 kg[2] | — |
| Voltage | 200-240 VAC[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Table size | 5 in.[1] | — |
| Arm configuration | Double arm[1] | — |
| Wiring | 3 Wire + ground[1] | — |
| Model | — | 1000P[3] |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
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