Comparison ledger
Edwards IXH 610, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IXH 610Edwards | |
|---|---|---|
| OEM | Edwards | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards IXH | Tri -Mist 850 Electronic Air Filter |
| Specifications | ||
| Configuration | Fully refurbished[1] | — |
| Type | dry vacuum pump[2] | — |
| Application | harsh chemical applications[2] | — |
| Input power | 1.3 kW[2] | — |
| Peak pumping speed | 665 m3/h (391 CFM)[2] | — |
| Ultimate pressure | 3.7 x 10-3 Torr[2] | — |
| Inlet connection | ISO100[3] | — |
| Exhaust connection | KF40[3] | — |
| Weight | 782 lbs[3] | — |
| System power at ultimate | 2.6 kW[4] | — |
| Typical water flow | 3 l/m[4] | — |
| Purge flow range | 22/44 slm[4] | — |
| Dry pump size | 100 m3/h[4] | — |
| Booster size | 600 m3/h[4] | — |
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