Comparison ledger
EV Group 120 Automated Coater Processing, Laurell EDC-650-15 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | EDC-650-15 BLaurell |
|---|---|---|
| OEM | EV Group | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | Laurell EDC-650-15 B |
| Specifications | ||
| Configuration | 50/60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| OEM | — | Laurell[2] |
| Model | — | EDC-650-15 B[2] |
| Type | — | EDC System[2] |
| Controller | — | 650-series[2] |
| Max. substrate size | — | 300mm (9" x 9")[2] |
| Max. RPM | — | 12000 rpm[2] |
| Mounting options | — | Tabletop, In-Deck, On-deck[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →