Laurell
EDC-650-15 B
Laurell EDC-650-15 B is an EDC System spin coater in the 650-series. Laurell EDC-650-15 B has a maximum substrate size of 300mm (9" x 9"). Laurell EDC-650-15 B has a maximum speed of 12000 rpm.[1]
What it is
General reference — not yet source-verifiedA spin coater is a resist processing tool used to distribute liquid coatings by controlled rotation of a substrate. The EDC-650-15 B belongs to the class of wafer and substrate coating equipment used before exposure and other patterning steps.
How it works
The EDC-650-15 B is a 650-series EDC system with tabletop, in-deck, and on-deck mounting options. The EDC-650-15 B is specified with a maximum speed of 12000 rpm.[1]
Where it fits in the process flow
General reference — not yet source-verifiedA spin coater sits early in a lithography or surface-processing flow, after substrate cleaning and before exposure, bake, or development steps that follow coating. The machine prepares a resist or other liquid film for later pattern transfer.
Applications
General reference — not yet source-verifiedA resist processing spin coater is used for applying photoresist and related thin liquid coatings on wafers and other flat substrates. The same class of equipment also serves laboratory and pilot-line coating work on planar parts.
- Spin coating
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the EDC-650-15 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-15 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-15 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EDC-650-15 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-650-15 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-650-15 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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