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Comparison ledger

12 Benchtop Lapping PolishingversusPM5

Lapmaster 12 Benchtop Lapping Polishing, Logitech PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PM5Logitech
OEMLapmasterLogitech
CategoryCMPCMP
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 12 Benchtop Lapping PolishingLogitech PM5
Specifications
MakeLapmaster[1]—
Model12[1]PM5[6]
CategoryCMP[2]—
Type/ApplicationSingle sided[3]—
Plate diameter12 in[3]—
No. of conditioning rings3[4]—
ConfigurationRing lapper[4]—
BaseRigid, lightweight, cast aluminum base[4]—
Standard RPM60 RPM[4]—
RPM range with variable speed drive0-60[4]—
Drive motor - lapper0.5 HP[4]—
Drive motor - polisher0.75 HP[4]—
Length25 in[4]—
Width18 in[4]—
Height24 in[4]—
Estimated shipping weight240 lbs[4]—
Approximate weight135 lbs / 61 kg[5]—
Approximate dimensions24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[5]—
Electrical systemVarious voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[5]—
Motor1/3 hp / 0.25 kW motor with gear reducer[5]—
Abrasive feed systemDesigned for water or oil based lapping slurries[5]—
Automatic cycle timerAutomatic digital cycle timer[5]—
Ring configurationRing lapper[4]—
Ring ID4.25 inches[4]—
Manufacturer—Logitech[6]
Application—Polishing and lapping[6]
Abrasive autofeed cylinder compatibility—Abrasive autofeed cylinder for use with a Logitech PM5 or LP50 system[7]
Sample wafer size—4 inch (100mm) or smaller[8]
Power supply voltage—Single phase AC100V[8]
Machine type—Lapping and polishing system[8]
Number of workstations—Single[9]
Wafer size—100 mm (4 inches) or smaller[8]
Polishing plate material—Stainless steel[8]
Lapping plate material—Cast iron[8]
Sample holding method—Vacuum[8]
Variable plate speed—Yes[8]
Slurry delivery method—Peristaltic pump[8]
Roller arm assembly—Yes[8]
Emergency stop—Yes[8]

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Sources (9)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lapmaster-wolters.comlapmaster-wolters.com
  4. [4]catalog.lapmaster.comcatalog.lapmaster.com
  5. [5]lapmaster-wolters.comlapmaster-wolters.com
  6. [6]smif.pratt.duke.edusmif.pratt.duke.edu
  7. [7]web.archive.orgweb.archive.org
  8. [8]manualslib.commanualslib.com
  9. [9]waferpedia.comwaferpedia.com