Logitech
PM5
The Logitech PM5 is a precision lapping and polishing system. The PM5 is a single-workstation machine for small-scale production and research. The PM5 supports wafer sizes up to 4 inches (100mm).[1][2]
Plate 01Logitech Ltd PM5 Precision Lapping & Polishing System
LogitechLtdWatch on YouTubePlate 02Logitech PM5 System
TTC VideoWatch on YouTubePlate 03Logitech PM5 Flatness Monitor
TTC VideoWatch on YouTubePlate 04Logitech PM5 Vacuum System
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What it is
The PM5 can process wafers up to 100 mm (4 inches) in diameter. The system uses a stainless steel plate covered with a polishing cloth for polishing and a cast iron plate for lapping. The machine is compatible with an abrasive autofeed cylinder for automated slurry delivery. The PM5 features a vacuum-based sample holder and variable plate speed control.[2][5][4][6]
How it works
The PM5 operates with a rotating lapping or polishing plate mounted on a drive plate. The sample is held in a PP6 jig by vacuum and pressed onto the plate. Slurry or abrasive is delivered onto the plate via a peristaltic pump from a chemical tank. A roller arm assembly guides the jig across the plate. The machine includes an emergency stop button and a control panel with a process data screen.[2][6]
What can it run?
Process applications and technology nodes documented for this tool.
- Polishing
- Lapping
What do the numbers mean?
Power & electrical1
Vacuum & pumping2
Wafer handling2
Configuration & options12
- Abrasive autofeed cylinder compatibility
- Abrasive autofeed cylinder for use with a Logitech PM5 or LP50 system[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer size supported by the PM5?
The PM5 supports wafers up to 4 inches (100mm) in diameter.[5][2]
What are the power requirements of the PM5?
How does the PM5 hold the sample during processing?
Can the PM5 be used for copper processes?
Yes, the PM5 can be used for copper wiring in VLSI fabrication.[2]
What plate types are available for the PM5?
The PM5 uses a stainless steel plate with polishing cloth for general polishing, a cast iron plate for lapping, and a stainless steel plate with polishing cloth for silicon carbide polishing.[2]
Not publicly documented
The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
- [2]manualslib.com — manualslib.commanualslib.com
- [3]nanolab.ucla.edunanolab.ucla.edu
- [4]web.archive.org — web.archive.orgweb.archive.org
- [5]waferpedia.com — waferpedia.comwaferpedia.com
- [6]PM5 Lapping Machine Operation Manual | PDF | Electrical Connector | Switch — scribd.comscribd.com
Last updated Sep 28, 2026.
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