Comparison ledger
SCREEN SS W 80 A-AR, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SS W 80 A-ARSCREEN | 1000PYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SS W 80 | YES 1000P |
| Specifications | ||
| Configuration | Fully upgraded DNS SS-W80A-AR:[1] | Parallel plate[3] |
| Wafer size | 200mm Notch Standard Silicon Wafer Substrate (Left to Right wafer flow)[1] | — |
| Make | SCREEN / DNS[1] | — |
| Model | SS W 80 A-AR[1] | 1000P[2] |
| Wafer Sizes | 8 inch[1] | — |
| Scrubbing Units | 2 front, 2 back side[1] | — |
| Reverse Units | 2[1] | — |
| DI Water Rinse | Included[1] | — |
| Back Rinse | Included[1] | — |
| Brush Rinse | Included[1] | — |
| Nano DIW with N2 | Included[1] | — |
| Wafer substrate | 200mm notch standard silicon wafer substrate[1] | — |
| Communication | SECS II or GEM included[1] | — |
| Wafer log tracking | Real time wafer log tracking system per each wafer[1] | — |
| Auto back-up system | Included[1] | — |
| Recipe processing | Wafer level recipe processing; multi recipe/job processing per cassette (max 25 recipes per 1 cassette)[1] | — |
| Automatic wafer collection feature | Included[1] | — |
| Auto teaching feature | Included[1] | — |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →