Comparison ledger
Applied Materials 0010-03254 E Chuck, Hitachi 8840, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 8840Hitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Hitachi 8840 |
| Specifications | ||
| Wafer size | — | 8-inch or 6-inch[1] |
| CD measurement range | — | 0.1 to 10 μm[1] |
| CD measurement reproducibility | — | ±1% or 0.005 μm (3 sigma), whichever larger[1] |
| Throughput | — | 26 wafers/hour (continuous measurement, 1 point/chip, 5 chips/wafer)[1] |
| Secondary electron image resolution | — | 5 nm (50 Å) at 0.8 kV[1] |
| Magnification | — | x1000 to x150,000 (SEM), about x110 (optical)[1] |
| Stage movement range | — | X and Y: 0 to 200 mm[1] |
| Stage drive | — | Pulse motor[1] |
| Stage max speed | — | 50 mm/s[1] |
| Electron gun | — | Schottky emission type[1] |
| Accelerating voltage | — | 500 to 1300 V (variable in 10 V steps)[1] |
| Lens system | — | Electromagnetic condenser lens system, FCM objective lens[1] |
| Secondary electron detection | — | 2-stage detection system[1] |
| Objective lens aperture | — | Heating type movable aperture, 4 openings selectable outside column[1] |
| Scanning coil | — | 2-stage deflection[1] |
| Stigmator coil | — | 8-pole electromagnetic type (X, Y)[1] |
| Probe current monitoring | — | Faraday cup incorporated with automatic measurement function[1] |
| Optical microscope field | — | 1.2 mm square, monochrome image[1] |
| Display | — | 20-inch monitor, EWS (GUI), interactive computer operation[1] |
| Scanning modes | — | TV scan, raster rotation, auto brightness/contrast control[1] |
| File storage | — | 3.5-inch floppy disk drive, 3.5-inch magneto-optic disk drive[1] |
| Data processing | — | Average value, standard deviation, maximum/minimum values[1] |
| Printer | — | 80-character thermal printer[1] |
| Vacuum system | — | Ion pump (3 units), turbo molecular pump (2 units), optional rotary pump (2 units)[1] |
| Main column dimensions | — | 1170 x 1890 x 1650 mm, 1100 kg[1] |
| Display unit dimensions | — | 600 x 1331 x 1800 mm, 320 kg[1] |
| Power supply dimensions | — | 535 x 600 x 1500 mm, 200 kg[1] |
| Rotary pump dimensions | — | 360 x 640 x 520 mm, 30 kg each (option)[1] |
| Power requirement | — | Single Phase, 100V[2] |
| Turbo controller | — | Included[2] |
| Lamp for alignment | — | 1 unit[2] |