Comparison ledger
ASML TWINSCAN NXE:3600D, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | 5 nm, 3 nm | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML TWINSCAN NXE:3600D | Brooks 017-0146-01 Prealigner |
| Specifications | ||
| Wavelength | 13.5 nm[1] | — |
| Numerical Aperture (NA) | 0.33[1] | — |
| Resolution | 13 nm[1] | — |
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