ASM Eagle

Models in this family

1. Eagle

   ASM Eagle is a PECVD (plasma-enhanced chemical vapor deposition) system described as a 2-chamber unit with SiH4, N2O, and C3F8 gases.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Eagle XP8	—	—	Plasma-enhanced atomic layer deposition (PEALD) configuration on the XP8 platform	web.archive.org[1]

2. 

   Eagle Express GoCu

   The ASM Eagle Express GoCu is a wire bonder.

3. 

   Eagle XP

   ASM Eagle XP is an ALD (Atomic Layer Deposition) system with a 12-inch wafer size.

4. 

   Eagle XP 5

   The ASM Eagle XP 5 is a bonder described as a PE-ALD system mainframe with PC and software.

5. Eagle XP 5 PE-ALD

   The ASM Eagle XP 5 PE-ALD is a plasma-enhanced atomic layer deposition system.

6. 

   Eagle Xtreme

   The ASM Eagle Xtreme is a wire bonder.

Sources