Waferpedia

Tool family

ASM Epsilon

ASMDeposition2 entries
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Models in this family

  1. Epsilon 2000
  2. Epsilon E 2000 Plus

    The ASM Epsilon E 2000 Plus is a chemical vapor deposition tool for 4-inch wafers with an RP & SiGe configuration, a load lock, and a gas delivery system for H2, N2, SiH4, HCL, B2H6, PH3, GeH4, and DCS.

All entries

  1. Epsilon 2000ASM
    CategoryDepositionWafer150mm
    26 specs
  2. Epsilon E 2000 PlusASM

    The ASM Epsilon E 2000 Plus is a chemical vapor deposition tool for 4-inch wafers with an RP & SiGe configuration, a load lock, and a gas delivery system for H2, N2, SiH4, HCL, B2H6, PH3, GeH4, and DCS.

    11 specs