Waferpedia

Tool family

Oxford Instruments 800

Models in this family

  1. The Oxford Instruments 800 is a plasma-enhanced chemical vapor deposition (PECVD) system.

    Cited variants

    DesignationGenerationVintageChangesSource
    800 Plus (Plasmalab800Plus)——Larger table (380 mm or 460 mm) and support for 300 mm wafersnanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu