Waferpedia

Tool family

SUSS MicroTec ACS300 Gen3

SUSS MicroTec1 entry

The ACS300 Gen3 is an automated coating and developing system for wafers up to 300 mm.

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Models in this family

  1. ACS300 Gen3Gen3

    The ACS300 Gen3 is an automated coating and developing system for wafers up to 300 mm.