Waferpedia

Kulicke & Soffa

982-10 Dicing

The K&S 982-10 is a dicing saw manufactured by Kulicke & Soffa. The K&S 982-10 has a blade capacity of 2 inches. The K&S 982-10 uses a 200mm vacuum chuck.[1][2]

982-10 Dicing — Inventory photo
Fig. 01982-10 DicingInventory photo[1]

Power

208V, 3-phase[1]

Vacuum

200mm[1]

What it is

General reference — not yet source-verified

Dicing saws are used in semiconductor packaging to separate individual integrated circuit die from a wafer after front-end processing.

How it works

The blade capacity of the K&S 982-10 is 2 inches.[1][2]

Applications

General reference — not yet source-verified

Dicing saws of this class are also used in the fabrication of discrete components and microelectromechanical systems (MEMS).

What do the numbers mean?

Power & electrical3

Voltage
208V, 3-phase[1]
Accurate?
Voltage
208V[1]
Accurate?
Phase
3-phase[1]
Accurate?

Vacuum & pumping1

Vacuum chuck
200mm[1]
Accurate?

Configuration & options3

Blade capacity
2”[1]
Accurate?
Rated current
15A[1]
Accurate?
Rated power
3100VA[1]
Accurate?

Vintage & configurations

  1. 1996Vintage[3]

    One source states 1996 vintage.

  2. 1999Vintage[2]

    One source states 1999 vintage.

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208V, 3-phase[1]
  • Vacuum chuck200mm[1]
  • Voltage208V[1]
  • Phase3-phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the vacuum chuck size on the K&S 982-10?

The K&S 982-10 uses a 200 mm vacuum chuck.[1][2]

What electrical specifications does the K&S 982-10 have?

The K&S 982-10 operates on 208 V, 3-phase supply, with a rated current of 15 A and a rated power of 3100 VA.[1][2]

Not publicly documented

The following facts about the 982-10 Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the 982-10 Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 982-10 Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 982-10 Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 982-10 Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 982-10 Dicing are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
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Last updated Oct 2, 2026.

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