Lam Research

Concept Two Speed

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Provisional entry — research in progress

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Concept Two Speed — Inventory photo — Fig. 01Concept Two SpeedInventory photo^[1]

What it is

The Concept Two Speed S (A) variant is a chamber-only etch tool. The Concept Two Speed NExT CVD 8 variant is a chemical vapor deposition system.^[5]

How it works

The Concept Two Speed S (A) etch chamber operates on 208 VAC, three-phase, 50/60 Hz, with a full load current of 21 A and a main breaker rating of 25 A. The Concept Two Speed NExT CVD 8 includes a SMIF interface, a cassette loader (LPI 2200), a loadlock indexer robot, a PEC slot with one cool station, a main power distribution panel (PDP), and a SECS/GEM host interface.^[5]^[6]

What do the numbers mean?

Power & electrical3

Voltage: 208 VAC^[5]
Phase: 3 phase^[5]
Frequency: 50/60 Hz^[5]

Wafer handling2

Intended wafer size: 8 inch^[6]
Wafer shape: Notch^[6]

Control & software1

SMIF interface: Yes^[6]

Configuration & options15

1 Shrink chamber^[1]; 1 Standard chamber^[1]
Manufacturer: Lam Research^[4]
Configuration option: Shrink chamber^[4]
Configuration option: Standard chamber^[4]
Asset #: 68566^[1]
Make: Lam / Novellus^[1]
Model: Concept Two Speed^[1]; 1 shrink chamber and 1 standard chamber^[1]
Process type: Etch chamber^[5]
Platform: Novellus Concept Two platform^[5]
Type: Chamber Only^[5]
Full load current: 21 A^[5]
Main breaker rating: 25 A^[5]
Largest load: 8 A^[5]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Concept Two Speed S (A)	—	2010–2010	Listed as a chamber-only configuration with 208 VAC, 3 phase, 50/60 Hz, 21 A full load current, 25 A main breaker rating, and 8 A largest load.	waferpedia.com^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 VAC^[5]
Phase3 phase^[5]
Frequency50/60 Hz^[5]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Concept Two Speed are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Two Speed are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Concept Two Speed are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Concept Two Speed are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Concept Two Speed is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Concept Two Speed are on record.
Answerable by: an OEM parts catalog or a service engineer