Nikon
NSR 2005 i 9 C i-Line
The Nikon NSR 2005 i 9 C is an i-line stepper produced by Nikon. The Nikon NSR 2005 i 9 C uses a mercury lamp illumination source and a 5iB3 reduction lens to expose i-line photoresist on wafers up to 8 inches in diameter.[1][2]
Wafer size
Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it
Power
1750 KW[1]
Performance
CCD imaging + image processing[2]
Optics
6 inch Reticle[3]
How it works
The NSR 2005 i 9 C uses a 5x reduction lens (type 5iB3) with a numerical aperture selectable around 0.57. The illumination system employs a mercury lamp for i-line exposure, with sigma adjustable between 0.56 and 0.80. The wafer is positioned by a ball-screw-driven XY stage with two-axis interferometer feedback, offering a stroke of -115 to +150 mm in X and -160 to +115 mm in Y. Auto focus is performed using a halogen lamp and line sensor. Wafer alignment uses LSA (laser step alignment) with a HeNe laser or FIA (field image alignment) with a halogen lamp, detected by CCD imaging. The system includes a chamber with temperature control set to 23°C.[1][2]
What do the numbers mean?
Power & electrical4
- Lamp Power Supply[1]
Wafer handling12
Optics & imaging19
Performance1
Control & software8
Dimensions & facilities1
Configuration & options23
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the numerical aperture of the lens?
The numerical aperture is 0.57, selectable over a range.[2]
What light source does the stepper use?
The light source is a mercury lamp producing i-line (365 nm) exposure.[1][2]
What alignment methods are available on the NSR 2005 i 9 C?
The stepper uses LSA (laser step alignment) with a HeNe laser and FIA (field image alignment) with a halogen lamp, detected by CCD imaging.[2]
Not publicly documented
The following facts about the NSR 2005 i 9 C i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 9 C i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 9 C i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 9 C i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2005 i 9 C i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2005 i 9 C i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
Last updated Sep 28, 2026.
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