Ontrak

DSS 200 Series II Post

CMPIntroduced 2023Ontrak DSS 200 family

Research Quality: 60% complete

The Ontrak DSS 200 Series II Post CMP Scrubber is a tool used for cleaning wafers after chemical mechanical polishing. The Ontrak DSS 200 Series II Post CMP Scrubber processes 8-inch wafers.^[1]^[2]^[3]^[4]

DSS 200 Series II Post — Inventory photo — Fig. 01DSS 200 Series II PostInventory photo^[1]

Introduced

2023

Power

200/ 208 / 220 VAC^[1]

Vacuum

80-100 PSI (Inlet)^[1]

What it is

The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP semiconductor process tool.^[1]^[5]^[2]^[3]^[4]

How it works

General reference — not yet source-verified

Post-CMP scrubbers remove slurry residue and other contaminants from wafers after chemical mechanical polishing.

A post-CMP scrubber typically combines liquid delivery, mechanical scrubbing, rinsing, and drain handling to clean the wafer surface before the next process step.

Where it fits in the process flow

General reference — not yet source-verified

The machine belongs in the wafer-cleaning sequence that follows planarization and prepares the wafer for downstream processing.

Applications

The Ontrak DSS 200 Series II is used in semiconductor manufacturing for post-CMP wafer cleaning.^[1]^[5]^[2]^[3]^[4]

Post CMP scrubber
Chemical mechanical polishing

What do the numbers mean?

Power & electrical8

Voltage: 200/ 208 / 220 VAC^[1]; 50/60 Hz^[1]
Breaker: 25 A (5.2 kW)^[1]
Total FLA: 6.8 A (1.4 kW)^[1]
Voltage: 200 / 208 / 220 VAC^[4]
Total FL: 6.8 A (1.4 kW)^[4]
Largest Load: 3.6 A (0.8 kW)^[4]
Voltage: 200/208/220 VAC (50/60Hz)^[6]

Vacuum & pumping9

CDA (Clean Dry Air): 80-100 PSI (Inlet)^[1]
DI Water: 60-80 PSI (Inlet)^[1]
Process Solutions / Chems: 15 PSI (Inlet)^[1]
CDA (Clean Dry Air) Inlet: 80-100 PSI, 3/8" OD Tubing^[1]
DI Water Inlet: 60-80 PSI, 3/4" OD Teflon Tubing^[1]
Process Solutions / Chems Inlet: 15 PSI, 1/4" OD Teflon Tubing^[1]
CDA Inlet Pressure: 80-100 PSI^[1]
DI Water Inlet Pressure: 60-80 PSI^[1]
Process Solutions / Chems Pressure: 15 PSI^[1]

Wafer handling2

Wafer Sizes: 8 inch^[1]
Wafer Size: 8 inch^[1]

Dimensions & facilities2

CDA (Clean Dry Air): 80-100PSI (Inlet), 3/8” OD tubing^[6]
CDA Tubing: 3/8" OD^[1]

Configuration & options18

Largest Load: 3.6 A (0.8kW)^[1]; 3/8" OD Tubing^[1]; 3/4" OD Teflon Tubing^[1]; 1/4" OD Teflon Tubing^[1]
Drain: 132 GpH Peak, 60 GpH Idle, 2" CPVC^[1]
Noise Level: 70 dB (during process)^[1]
Breaker: 25A (5,2kW)^[6]
Total FLA: 6,8A (1,4kW)^[6]
Largest load: 3,6A (0,8kW)^[6]
DI Water: 60-80PSI (Inlet), 3/4" OD Teflon tubing^[6]
Process solutions/chems: 15PSI (Inlet), 1/4" OD Teflon tubing^[6]
Drain: 132GpH peak, 60GpH idle. 2” CPVC^[6]
DI Water Tubing: 3/4" OD Teflon^[1]
Process Solutions / Chems Tubing: 1/4" OD Teflon^[1]
Drain Flow (Peak): 132 GpH^[1]
Drain Flow (Idle): 60 GpH^[1]
Drain Pipe Size: 2" CPVC^[1]
Noise Level (during process): 70 dB^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage200/ 208 / 220 VAC^[1]
Configuration50/60 Hz^[1]
Breaker25 A (5.2 kW)^[1]
Total FLA6.8 A (1.4 kW)^[1]
CDA (Clean Dry Air)80-100 PSI (Inlet)^[1]
DI Water60-80 PSI (Inlet)^[1]
Process Solutions / Chems15 PSI (Inlet)^[1]
Voltage200 / 208 / 220 VAC^[4]
Total FL6.8 A (1.4 kW)^[4]
Largest Load3.6 A (0.8 kW)^[4]
Voltage200/208/220 VAC (50/60Hz)^[6]
CDA (Clean Dry Air) Inlet80-100 PSI, 3/8" OD Tubing^[1]
DI Water Inlet60-80 PSI, 3/4" OD Teflon Tubing^[1]
Process Solutions / Chems Inlet15 PSI, 1/4" OD Teflon Tubing^[1]
CDA Inlet Pressure80-100 PSI^[1]
DI Water Inlet Pressure60-80 PSI^[1]
Process Solutions / Chems Pressure15 PSI^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Ontrak DSS 200 Series II handle?

The DSS 200 Series II is designed to process 8-inch wafers.^[1]^[2]^[3]^[4]

What are the utility supply requirements for CDA and DI water?

Clean dry air (CDA) requires 80-100 PSI inlet with 3/8-inch OD tubing; deionized (DI) water requires 60-80 PSI inlet with 3/4-inch OD Teflon tubing.^[1]^[5]^[2]^[3]^[4]

What is the noise level during operation?

The noise level during process is 70 dB.^[1]^[5]^[2]^[3]^[4]

Not publicly documented

The following facts about the DSS 200 Series II Post are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Series II Post are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DSS 200 Series II Post are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DSS 200 Series II Post are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSS 200 Series II Post are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSS 200 Series II Post is not on record.
Answerable by: an OEM datasheet or a fab qualification report