Tool family
The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.
The Ontrak DSS 200 is a semiconductor manufacturing system that processes 8-inch wafers.
The Ontrak DSS 200 Post is a double-sided PVA post-CMP wafer scrubber. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Ontrak DSS200 Series 1 | — | — | Designed to clean 100mm to 200mm wafers and has a universal load station. | axustech.com[1] |
| Ontrak DSS200 Series 2 | — | — | Offers production-proven cleaning results, throughputs of 45-65 wafers per hour, and a 200mm ergonomic load station. | axustech.com[2] |
The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.
The Ontrak DSS 200 Synergy is a wet processing and cleaning system used in semiconductor manufacturing for wafer surface preparation and contamination removal.
The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.
The Ontrak DSS 200 is a semiconductor manufacturing system that processes 8-inch wafers.
The Ontrak DSS 200 Post is a double-sided PVA post-CMP wafer scrubber. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.
The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.
General referenceThe Ontrak DSS 200 Synergy is a wet processing and cleaning system used in semiconductor manufacturing for wafer surface preparation and contamination removal.