Pfeiffer
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The Pfeiffer Duo 3 Vacuum is an oil-sealed rotary vane vacuum pump. The Pfeiffer Duo 3 Vacuum is a two-stage pump for coarse and medium vacuum. The Pfeiffer Duo 3 Vacuum is available in standard, M, and MC variants.[1]
The DUO 3 is used for low and medium vacuum applications.[3]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Duo 3 | — | — | Standard version | pfeiffervacuum.com[1] |
| Duo 3 M | — | — | Differs from the standard version by magnetic coupling | pfeiffervacuum.com[1] |
| Duo 3 MC | — | — | Differs from the standard version by operating fluid F4, magnetic coupling encapsulated on the pump side, changed vane material, hose connection on the gas ballast valve, and leakage rate ≤ 1 × 10-8 Pa m3/s | pfeiffervacuum.com[1] |
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The M version differs from the standard version by magnetic coupling.[1]
The MC version differs from the standard version by operating fluid F4, an encapsulated magnetic coupling on the pump side, changed vane material, a hose connection on the gas ballast valve, and a leakage rate of not more than 1 × 10-8 Pa m3/s.[1]
The following facts about the Duo 3 Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Duo 3 Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Duo 3 Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Duo 3 Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Duo 3 Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Duo 3 Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 4, 2026.