SUSS MicroTec
AD12
The SUSS MicroTec AD12 is a manual coating and developing system. The AD12 supports aqueous processes such as puddle and spray developing, and wafer cleaning. The AD12 accommodates wafers up to 300 mm.[1]
Where it fits in the process flow
The AD12 is part of the broader SUSS MicroTec product line that includes exposure systems, coating/developing equipment, and wafer bonders. In a production line, the AD12 typically upstream steps include spin coating and baking, while downstream processes may involve etch, lift-off, or additional lithography cycles. The manual nature of the AD12 makes it suitable for research, pilot-line, or low-volume manufacturing where automation is not required.[1]
What do the numbers mean?
Wafer handling2
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What is the maximum substrate size the AD12 can handle?
The AD12 is a manual system that can handle substrates up to 300 mm in size.[1]
What types of processes is the AD12 designed for?
The AD12 is designed for aqueous processes, including puddle developing and wafer cleaning.[1]
Not publicly documented
The following facts about the AD12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AD12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AD12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AD12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AD12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AD12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]hilpert.ch — hilpert.chhilpert.ch
Last updated Sep 22, 2026.
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