Tokyo Electron

Mark 7

Wet Processing / Clean Tokyo Electron Mark family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Vacuum

Vacuumless robotic transport^[2]

Gas delivery

2011

What is it?

Applications

The platform offers features such as process parameter expandability, GEM host communication, and compliance with SMIF interface and safety standards. An automatic brush pressure controller is available in scrubber configurations.^[2]

What do the numbers mean?

Vacuum & pumping3

Wafer transport: Vacuumless robotic transport^[2]
Chuck types: Mechanical and vacuum chucks for top and back side cleaning^[2]
Brush control: Automatic brush pressure controller^[2]

Wafer handling1

Wafer size range: 5 inch to 8 inch^[2]

Gas & chemistry4

Coaters & Developers Vintage: 2011(inventory listing)
Coaters & Developers Vintage: 1995(inventory listing)
Coaters & Developers Vintage: 2000(inventory listing)
Coaters & Developers Vintage: 1993(inventory listing)

Control & software1

Interface: SMIF interface^[2]

Configuration & options8

1C2D^[1]
Optional cleaning: Jet or megasonic cleaning^[2]
Host communication: GEM host communication^[2]
Compliance: S2-93 and CE mark^[2]
Vintage: 2011(inventory listing)
Vintage: 1995(inventory listing)
Vintage: 2000(inventory listing)
Vintage: 1993(inventory listing)

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Mark 7 Coater / Developer	—	—	Listed as a Coater / Developer configuration of Mark 7.	Equipment inventory listing^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Wafer transportVacuumless robotic transport^[2]
Chuck typesMechanical and vacuum chucks for top and back side cleaning^[2]
Brush controlAutomatic brush pressure controller^[2]
Coaters & Developers Vintage2011
Coaters & Developers Vintage1995
Coaters & Developers Vintage2000
Coaters & Developers Vintage1993

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

Tel Mark 7 Interface ModuleIn Productionsource^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Does the Mark 7 scrubber use vacuum for wafer transfer?

The scrubber variant features a non-vacuum wafer transfer capability.^[2]

What cleaning methods are available on the Mark 7-based scrubber?

The scrubber uses brushes with a mechanical chuck for cleaning both sides. Optional high-pressure jet spray or megasonic cleaning can be added.^[2]

What host communication interface does the Mark 7 platform support?

The platform supports GEM host communication and a SMIF interface.^[2]

Not publicly documented

The following facts about the Mark 7 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 7 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Mark 7 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 7 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 7 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the Mark 7 are on record.
Answerable by: university cleanroom staff or an OEM application specialist