Ulvac

Phi Adept 1010 Automated Depth Profiling

Q: What type of instrument is the Adept 1010?

The Adept 1010 is a quadrupole dynamic secondary ion mass spectrometer.

Q: What is the main use of the Adept 1010?

The Adept 1010 is used for quantitative depth profiling of semiconductor structures, thin-film interfaces, and trace-contaminant layers.

Q: Does the Adept 1010 operate in dynamic SIMS mode?

The Adept 1010 operates in dynamic mode.

Q: What analytical principle does the Adept 1010 use?

The Adept 1010 uses sputter-initiated secondary ion emission followed by quadrupole mass analysis.

Ulvac Phi Adept 1010 Automated Depth Profiling family

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Phi Adept 1010 Automated Depth Profiling — Inventory photo — Fig. 01Phi Adept 1010 Automated Depth ProfilingInventory photo^[1]

What it is

The Ulvac Phi Adept 1010 Automated Depth Profiling Tool is a ULVAC-PHI quadrupole dynamic secondary ion mass spectrometer used for automated depth profiling.^[1]^[2]^[3]

The Adept 1010 is a semiconductor analytical instrument associated with quantitative depth profiling of solid materials.^[3]^[2]

How it works

A quadrupole analyzer separates the secondary ions by mass-to-charge ratio during continuous sputtering in dynamic mode.^[3]^[2]

The Adept 1010 uses a primary ion beam and secondary ion extraction optics for depth profiling and surface characterization.^[3]^[2]

Applications

The Adept 1010 is used for quantitative dopant depth profiling in semiconductor structures.^[3]^[2]

The Adept 1010 is used for thin-film interface analysis and trace-contaminant measurement.^[3]^[2]

What do the numbers mean?

Power & electrical1

Power supply: 200–230 V AC, 50/60 Hz, 50 A (single-phase)^[2]

Dimensions & facilities2

Net weight: 1,350 kg^[2]
Shipping weight: ~2,400 kg^[2]

Configuration & options7

Manufacturer: Ulvac^[1]
Model: Phi Adept 1010^[1]
Instrument type: Quadrupole dynamic secondary ion mass spectrometer (SIMS)^[2]
Primary beam energy range: 0.25–11 keV^[3]
Mass range: 1–340 amu^[3]
Operating temperature: 20°C ± 3°C^[2]
Relative humidity: <50%^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power supply200–230 V AC, 50/60 Hz, 50 A (single-phase)^[2]

Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of instrument is the Adept 1010?

The Adept 1010 is a quadrupole dynamic secondary ion mass spectrometer.^[3]^[2]

What is the main use of the Adept 1010?

The Adept 1010 is used for quantitative depth profiling of semiconductor structures, thin-film interfaces, and trace-contaminant layers.^[3]^[2]

Does the Adept 1010 operate in dynamic SIMS mode?

The Adept 1010 operates in dynamic mode.^[3]^[2]

What analytical principle does the Adept 1010 use?

The Adept 1010 uses sputter-initiated secondary ion emission followed by quadrupole mass analysis.^[3]^[2]

Not publicly documented

The following facts about the Phi Adept 1010 Automated Depth Profiling are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Phi Adept 1010 Automated Depth Profiling are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Phi Adept 1010 Automated Depth Profiling are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Phi Adept 1010 Automated Depth Profiling are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Phi Adept 1010 Automated Depth Profiling are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Phi Adept 1010 Automated Depth Profiling is not on record.
Answerable by: an OEM datasheet or a fab qualification report