Wafab
Aeris FTB
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Wafab Aeris FTB is a wet bench used for wet processing and cleaning in semiconductor manufacturing.[1][2]
What it is
How it works
General reference — not yet source-verifiedWet benches are automated or manual workstations that perform wet chemical processes on wafers, such as cleaning, etching, and rinsing.
A wet bench typically contains process tanks for chemical baths, spray modules, and rinse and dry stations, with a central robot or operator handling wafer transfer between steps.
Where it fits in the process flow
General reference — not yet source-verifiedWet benches are used in the front-end-of-line and back-end-of-line of semiconductor manufacturing for wafer cleaning and surface preparation.
Wet cleaning steps typically occur before and after photolithography, etching, deposition, and other process steps to remove contaminants and residues.
Applications
General reference — not yet source-verifiedWet benches perform a variety of wet chemical processes, including cleaning with acids, bases, and solvents, as well as wet etching of thin films.
Common process steps carried out on wet benches include RCA clean, dilute HF dip, photoresist stripping, and post-etch residue removal.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Aeris FTB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the Aeris FTB are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Aeris FTB are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Aeris FTB are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Aeris FTB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Aeris FTB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Aeris FTB — Wafab | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 24, 2026.
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