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Zeiss

NVision 40

Zeiss NVision 40 family
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The Zeiss NVision 40 is a SEM-FIB microscope. The Zeiss NVision 40 combines a high-resolution SEM with precision milling and nanofabrication capabilities. The Zeiss NVision 40 includes a Schottky field emission Gemini column and a SIINT Zeta Ga+ ion FIB column.[1][2]

NVision 40 — Inventory photo
Fig. 01NVision 40Inventory photo[3]

Power

208-230 V[3]

Gas delivery

Has W, C SiO2 and H20 gases installed[3]

Optics

Schottky field emission Gemini column[1]

What it is

The Zeiss NVision 40 is a focused ion beam and scanning electron microscope system used for high-resolution imaging, precision milling, and nanofabrication.[1][2]

The NVision 40 is an electron microscopy platform that combines SEM imaging with FIB sample modification and analytical work.[1][2]

How it works

The Zeiss NVision 40 uses a Schottky field emission Gemini SEM column and a Ga+ ion FIB column, and the system includes gas injection capability for deposition and etching.[1][2]

The NVision 40 includes micromanipulators for in situ lift-out, electrical probing, and specimen interaction.[1]

Where it fits in the process flow

The NVision 40 supports nanoscale imaging, cross-sectioning, lift-out, etching, deposition, and nanofabrication tasks that typically follow device or materials preparation and precede downstream analysis.[1][2][5]

Applications

The Zeiss NVision 40 is used for high-resolution imaging, precision milling, nanostructure fabrication, and analytical inspection.[1][2][5]

The NVision 40 supports gas-assisted deposition and etching with W, C, SiO2, H2O, and XeF2 chemistries, and it supports nanometer-scale patterning and e-beam lithography through installed pattern-generation capability.[1][5]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • One of the controllers on the two turbo pumps is not operational.

What do the numbers mean?

Power & electrical6

208-230 V[3]
Accurate?
50-60 Hz[3]
Accurate?
SEM operating voltage
100 V to 30 kV[1]
Accurate?
FIB operating voltage
1 kV to 30 kV[1]
Accurate?
Power
208-230 V[3]
Accurate?
Frequency
50-60 Hz[3]
Accurate?

Vacuum & pumping2

One of the controllers on the two turbo pumps is not operational[3]
Accurate?
Controller status
One of the controllers on the two turbo pumps is not operational[4]
Accurate?

Gas & chemistry2

Has W, C SiO2 and H20 gases installed[3]
Accurate?
Gas delivery
Has W, C SiO2 and H20 gases installed[4]
Accurate?

Optics & imaging5

SEM column
Schottky field emission Gemini column[1]
Accurate?
SEM resolution
1.1 nm at 20 kV; 2.5 nm at 1 kV[1]
Accurate?
FIB column
SIINT Zeta Ga+ ion FIB column[1]
Accurate?
Ion beam resolution
4 nm at 1 pA[1]
Accurate?
Detectors
Everhart-Thornley detector, 4 quadrant backscatter, in-lens secondary electron detector, energy selective backscatter detector[1]
Accurate?

Configuration & options11

With kleindiek mm3a micromanipulator[3]
Accurate?
Xe F2 (option, not installed)[3]
Accurate?
The Omniprobe and the other kleindiek controllers / feedthroughs are removed[3]
Accurate?
Manufacturer
Zeiss[3]
Accurate?
Model
NVision 40[3]
Accurate?
Electron microscope type
SEM-FIB[2]
Accurate?
FIB ion current
0.1 pA to 45 nA[1]
Accurate?
Micromanipulator
With kleindiek mm3a micromanipulator[3]
Accurate?
XeF2
Option, not installed[3]
Accurate?
Lithography system
Raith Elphy Quantum lithography system[1]
Accurate?
Nanoscale lithography
NanoPattern Generating System (NPGS)[5]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration208-230 V[3]
  • Configuration50-60 Hz[3]
  • ConfigurationHas W, C SiO2 and H20 gases installed[3]
  • ConfigurationOne of the controllers on the two turbo pumps is not operational[3]
  • SEM operating voltage100 V to 30 kV[1]
  • FIB operating voltage1 kV to 30 kV[1]
  • Power208-230 V[3]
  • Frequency50-60 Hz[3]
  • Gas deliveryHas W, C SiO2 and H20 gases installed[4]
  • Controller statusOne of the controllers on the two turbo pumps is not operational[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the Zeiss NVision 40?

The Zeiss NVision 40 is a focused ion beam and scanning electron microscope system.[1][2]

Not publicly documented

The following facts about the NVision 40 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NVision 40 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NVision 40 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NVision 40 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NVision 40 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NVision 40 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]www-em.materials.ox.ac.uk — www-em.materials.ox.ac.ukwww-em.materials.ox.ac.uk
  2. [2]labwrench.com — labwrench.comlabwrench.com
  3. [3]Inventory photo
  4. [4]waferpedia.comwaferpedia.com
  5. [5]nanoscience.ucf.edu — nanoscience.ucf.edunanoscience.ucf.edu
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Last updated Oct 6, 2026.

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