Ontrak
DSS 200 Post
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ontrak DSS 200 Post is a double-sided PVA scrubber. The Ontrak DSS 200 Post is used for post-CMP cleaning and related wafer-cleaning applications. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.[1][2][3]
What it is
The Ontrak DSS 200 Post is a post-CMP wafer cleaner in the OnTrak DSS 200 family. The tool is a double-sided PVA scrubber for semiconductor wafer cleaning.[1][9][3]
How it works
Applications
What do the numbers mean?
Wafer handling4
Control & software1
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Ontrak DSS200 Series 1 | — | — | Designed to clean 100mm to 200mm wafers and has a universal load station. | axustech.com[2] |
| Ontrak DSS200 Series 2 | — | — | Offers production-proven cleaning results, throughputs of 45-65 wafers per hour, and a 200mm ergonomic load station. | axustech.com[1] |
| DSS-200 Series 1 | — | — | Designed to clean 100mm to 200mm wafers; standard features include universal load station, double-sided PVA scrub, dual brush boxes, ammonia dispense, IR assisted spin dry station, robotic unload, vertical unload station, touchscreen controls. | axustech.com[2] |
| DSS-200 Series 2 | — | — | Double-sided PVA scrubber offering 45-65 wafers per hour throughput; 200mm ergonomic load station, dark plastic covers protect light sensitive wafers, dual brush boxes, ammonia dispense, IR assisted spin dry station, robotic unload, vertical unload station, touchscreen controls. | axustech.com[1] |
| DSS-200 CE | — | — | Entrepix table lists Entrepix Series 2 CE with brush scrub, roller PVA brush, downforce control, optional edge scrub, optional MegPie megasonic transducer, optional megasonic nozzle, optional high-pressure DI water spray, optional heated DI water feed, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric-based, backside chemical, metal CMP cleans, STI CMP cleans. | entrepix.com[9] |
| Entrepix Synergy | — | — | Entrepix table lists Synergy with brush scrub, roller PVA brush, downforce control, optional accessories, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric or HCL-based, backside chemical, metal CMP cleans, STI CMP cleans. | entrepix.com[9] |
| Entrepix Integra | — | — | Entrepix table lists Integra with integrated cleaning, brush scrub, roller PVA brush, downforce control, optional accessories, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric or HCL-based, backside chemical, metal CMP cleans, STI CMP cleans, double contained process area. | entrepix.com[9] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the DSS 200 Post are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Post are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DSS 200 Post are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSS 200 Post are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSS 200 Post is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DSS 200 Post are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]axustech.com — axustech.comaxustech.com
- [2]axustech.com — axustech.comaxustech.com
- [3]OnTrak DSS200 Series 2 Post CMP Scrubber — s3-alliance.coms3-alliance.com
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]inventory listing
- [8]inventory listing
- [9]entrepix.com — entrepix.comentrepix.com
Last updated Oct 11, 2026.
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