Waferpedia

Manufacturer

Ultratech

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20 entries

  1. XLS 7800Ultratech
    CategoryLithography
  2. 602 Plate MaskUltratech

    The Ultratech 602 Plate Mask Cleaner is a cleaning tool designed for masks and plates in semiconductor manufacturing.

    CategoryWet Processing / Clean
  3. CGS 300 Stress MeasurementUltratech

    The Ultratech CGS 300 Stress Measurement is a semiconductor wafer stress measurement system associated with 12-inch wafers.

    CategoryMetrology & Inspection
  4. AP 300 EUltratech

    The Ultratech AP 300 E is a stepper used in lithography.

    CategoryLithography
  5. XLS 7500Ultratech

    The Ultratech XLS 7500 is an i-line stepper used for photolithography, capable of 0.50 µm resolution, and was ordered for manufacturing SAW and MEMS devices.

    CategoryLithography
  6. Titan 4700Ultratech

    The Ultratech Titan 4700 is a stepper for lithography with G and H line optics and a 1000W lamp.

    CategoryLithography
  7. Saturn 3 WaferUltratech

    Ultratech Saturn 3 Wafer is a wafer stepper produced by Ultratech for lithography applications.

    CategoryLithography
  8. Spectrum 3 eUltratech
    CategoryLithography
  9. 2244 I LithographyUltratech
    CategoryLithography
  10. Saturn Spectrum 300 BroadbandUltratech
  11. UltraStep 1500Ultratech

    The Ultratech UltraStep 1500 is a wafer stepper for lithography, handling wafers from 2 to 6 inches.

    CategoryLithography
  12. Spectrum 3 (2244 i)Ultratech
    CategoryLithography
  13. 603 PlateUltratech

    The Ultratech 603 Plate is a wet processing / clean tool.

    CategoryWet Processing / Clean
  14. 1700Ultratech

    The Ultratech 1700 is a stepper mentioned in a datasheet for Shipley LOL1000/LOL2000 lift-off layers, used in thin film head and semiconductor lithography for 1 μm features.

    CategoryLithography
  15. LSA100Ultratech

    The Ultratech LSA100 is a laser spike annealing system in Ultratech's Laser Processing line.

    CategoryThermal / DiffusionNode65 nm
  16. 1000 FamilyUltratech
    CategoryLithography
  17. TitanUltratech

    The Ultratech Titan is a stepper manufactured by Ultratech, with sources confirming its make as Ultratech and model as Titan.

    CategoryLithography
  18. LSA 100 A WaferUltratech

    The Ultratech LSA 100 A Wafer is a lithography tool in the LSA 100 A Wafer family.

    CategoryLithography
  19. AP200Ultratech

    The AP200 is a lithography system for advanced packaging (AP) listed on Ultratech's Unity Platform, which was first introduced on AP bump tools in mid-2004.

    CategoryLithography
  20. 1500Ultratech

    The Ultratech 1500 is a stepper designed for 6-inch wafers, offering both broadband and gh-line exposure sources.

    CategoryLithographyWaferWafer loader