Ultratech
XLS 7800
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ultratech XLS 7800 is a DUV wafer stepper. The Ultratech XLS 7800 uses a 248nm laser source. The Ultratech XLS 7800 is a 4X reduction step-and-repeat exposure tool.[1][2]
What it is
How it works
General reference — not yet source-verifiedA lithography stepper transfers a patterned image from a reticle to photoresist on a wafer by repeated exposure fields.
Where it fits in the process flow
General reference — not yet source-verifiedA lithography stepper sits in the patterning portion of the wafer fabrication flow between resist coating and later development, etch, or deposition transfer steps.
Applications
What do the numbers mean?
Vacuum & pumping1
Wafer handling4
Optics & imaging2
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Wafer holderceramic vacuum chuck[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the XLS 7800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XLS 7800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the XLS 7800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the XLS 7800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the XLS 7800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the XLS 7800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]tarasemi.com — tarasemi.comtarasemi.com
- [2]For Sale: GCA XLS 7800 248nm DUV Stepper | Used — photonicmicrodevices.comphotonicmicrodevices.com
- [3]Equipment inventory listing
- [4]microsystems.org — microsystems.orgmicrosystems.org
Last updated Oct 5, 2026.
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